Concave reflective SU-8 photoresist gratings for flat-field integrated spectrometers
Applied Optics, Vol. 45, Issue 23, pp. 5877-5880 (2006)
http://dx.doi.org/10.1364/AO.45.005877
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Abstract
On-chip spectrometry will play a leading role in the development of micro-optofluidic systems for analytical chemistry. Integrated spectrometers fabricated using a polymer-on-silicon platform have been designed, fabricated, and characterized. Reflective grating designs have been implemented using a recursive algorithm to calculate the facet positions as described by McGreer [Appl. Opt. 35, 5904 (1996)]. It is shown that the free spectral range, the output focal plane geometry, and the linear dispersion can be selected with a high degree of control independently of the chosen grating order. The polymer-on-silicon platform facilitates integration with microfluidic circuits and cost-efficient batch fabrication.
© 2006 Optical Society of America
OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(160.5470) Materials : Polymers
(220.2740) Optical design and fabrication : Geometric optical design
(230.3120) Optical devices : Integrated optics devices
History
Original Manuscript: September 1, 2005
Manuscript Accepted: December 16, 2005
Virtual Issues
Vol. 1, Iss. 9 Virtual Journal for Biomedical Optics
Citation
Dan A. Zauner, Anders M. Jorgensen, Thomas A. Anhoj, and Jörg Hübner, "Concave reflective SU-8 photoresist gratings for flat-field integrated spectrometers," Appl. Opt. 45, 5877-5880 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-23-5877
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