OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 45, Iss. 30 — Oct. 20, 2006
  • pp: 7785–7790

Characterization of dynamic microgyroscopes by use of temporal digital image correlation

Fujun Yang, Xiaoyuan He, and Chenggen Quan  »View Author Affiliations


Applied Optics, Vol. 45, Issue 30, pp. 7785-7790 (2006)
http://dx.doi.org/10.1364/AO.45.007785


View Full Text Article

Enhanced HTML    Acrobat PDF (875 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The advanced mechanical testing of microelectromechanical systems (MEMS) is necessary to provide feedback of measurements that can help the designer optimize MEMS structures and improve the reliability and stability of MEMS. We describe a digital image correlation (DIC) method for dynamic characterization of MEMS using an optical microscope with a high-speed complementary metaloxide semiconductor-based camera. The mechanical performance of a series of microgyroscopes is tested. The DIC method is employed to measure the microgyroscope in-plane displacement with subpixel accuracy. Use of the DIC method is less restrictive on the surface quality of the specimen and simplifies the measurement system. On the basis of a series of temporal digital images grabbed by a high-speed camera, the stability characteristic of the microgyroscopes is analyzed. In addition, the quality factors of the microgyroscopes are determined and agree well with other experimental methods.

© 2006 Optical Society of America

OCIS Codes
(060.2800) Fiber optics and optical communications : Gyroscopes
(100.2000) Image processing : Digital image processing
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.7280) Instrumentation, measurement, and metrology : Vibration analysis
(230.3990) Optical devices : Micro-optical devices

History
Original Manuscript: February 23, 2006
Revised Manuscript: June 28, 2006
Manuscript Accepted: July 3, 2006

Virtual Issues
Vol. 1, Iss. 11 Virtual Journal for Biomedical Optics

Citation
Fujun Yang, Xiaoyuan He, and Chenggen Quan, "Characterization of dynamic microgyroscopes by use of temporal digital image correlation," Appl. Opt. 45, 7785-7790 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-30-7785


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. J. H. Zhao, Y. Du, M. Morgen, and P. S. Ho, "Simultaneous measurement of Young's modulus, Poisson ratio, and coefficient of thermal expansion of thin films on substrates," J. Appl. Phys. 87, 1575-1577 (2000). [CrossRef]
  2. N. A. Fawcett, "A novel method for the measurement of Young's modulus for thick-film resistor material by flexural testing of coated beams," Meas. Sci. Technol. 9, 2023-2026 (1998). [CrossRef]
  3. M. Qin and V. M. C. Poon, "Young's modulus measurement of nickel silicide on crystal silicon by a surface profiler," J. Mater. Sci. Lett. 19, 2243-2245 (2000). [CrossRef]
  4. B. T. Comella and M. R. Scanlon, "The determination of the elastic modulus of microcantilever beam using atomic force microscopy," J. Mater. Sci. 35, 567-572 (2000). [CrossRef]
  5. S. H. Wang, C. J. Tay, C. Quan, and H. M. Shang, "Determination of deflection and Young's modulus of a micro-beam by means of interferometry," Meas. Sci. Technol. 12, 1279-1285 (2001). [CrossRef]
  6. S. Nakano, R. Maeda, and K. Yamanaka, "Evaluation of the elastic properties of a cantilever using resonant frequencies," Jpn. J. Appl. Phys. 36, 3265-3266 (1997). [CrossRef]
  7. T. Yi and C. J. Kim, "Measurement of mechanical properties for MEMS materials," Meas. Sci. Technol. 10, 706-716 (1999). [CrossRef]
  8. C. Rembe and E. P. Tibken Bm Hofer, "Analysis of the dynamics in microactuators using high-speed cine photomicrography," J. Microelectromech. Syst. 10, 137-145 (2001). [CrossRef]
  9. C. Rembe and R. S. Muller, "Measurement system for full three-dimensional motion characterization of MEMS," J. Microelectromech. Syst. 11, 479-488 (2002). [CrossRef]
  10. M. R. Hart, R. A. Conant, K. Y. Lau, and R. S. Muller, "Stroboscopic interferometer system for dynamic MEMS characterization," J. Microelectromech. Syst. 9, 409-418 (2000). [CrossRef]
  11. W. G. Knauss, I. Chasiotis, and Y. Huang, "Mechanical measurements at the micron and nanometer scales," Mech. Mater. 35, 217-231 (2003). [CrossRef]
  12. W. H. Peters, H. Zheng-Hui, M. A. Sutton, and W. F. Ranson, "Two-dimensional fluid velocity measurements by use of digital speckle correlation techniques," Exp. Mech. 24, 117-121 (1984). [CrossRef]
  13. M. A. Sutton, M. Cheng, W. H. Peters, Y. J. Chao, and S. R. McNeill "Application of an optimized digital correlation method to planar deformation analysis," Image Vision Comput. 4, 143-150 (1986). [CrossRef]
  14. J. Moreland, "Micromechanical instruments for ferromagnetic measurements," J. Phys. D 36, R39-R51 (2003). [CrossRef]
  15. K. Yum, Z. Y. Wang, P. A. Suryavanshi, and M. F. Yu, "Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids," J. Appl. Phys. 96, 3933-3938 (2003). [CrossRef]
  16. J. W. Chon, P. Mulvaney, and J. E. Sader, "Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids," J. Appl. Phys. 87, 3978-3988 (2000). [CrossRef]
  17. H. Benaroya, Mechanical Vibration: Analysis, Uncertainties, and Control (Prentice-Hall, 1998).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited