Abstract
composite films were prepared by a radio frequency ion-beam sputtering deposition process, and the refractive indices and extinction coefficients of the composite films were found to be between those of the and films. The structure of the as-deposited films was amorphous, and the surface roughness was approximately . The residual stress of the composite films was less than that of pure film. The structure of the composite films after annealing was amorphous, with low surface roughness and slightly increased residual stress. The film containing 6.3% displayed better properties than either the pure or the pure film.
© 2006 Optical Society of America
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