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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 7 — Mar. 1, 2006
  • pp: 1402–1409

Light-scattering characterization of transparent substrates

Myriam Zerrad, Carole Deumié, Michel Lequime, Claude Amra, and Mike Ewart  »View Author Affiliations

Applied Optics, Vol. 45, Issue 7, pp. 1402-1409 (2006)

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Angle-resolved light scattering has been used for decades to quantify the surface roughness of optical components. However, because this technique is affected by the contribution of both interfaces of the sample, it cannot be applied to transparent substrates. We show how to overcome this issue and apply these principles to the characterization of superpolished samples.

© 2006 Optical Society of America

OCIS Codes
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

ToC Category:
Characterization of Optical Coatings

Original Manuscript: March 1, 2005
Revised Manuscript: July 25, 2005
Manuscript Accepted: August 13, 2005

Myriam Zerrad, Carole Deumié, Michel Lequime, Claude Amra, and Mike Ewart, "Light-scattering characterization of transparent substrates," Appl. Opt. 45, 1402-1409 (2006)

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