Direct index of refraction measurements at extreme-ultraviolet and soft-x-ray wavelengths
Applied Optics, Vol. 45, Issue 8, pp. 1730-1736 (2006)
http://dx.doi.org/10.1364/AO.45.001730
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Abstract
Coherent radiation from undulator beamlines has been used to directly measure the real and imaginary parts of the index of refraction of several materials at both extreme-ultraviolet and soft-x-ray wavelengths. Using the XOR interferometer, we measure the refractive indices of silicon and ruthenium, essential materials for extreme-ultraviolet lithography. Both materials are tested at wavelength
© 2006 Optical Society of America
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(160.2120) Materials : Elements
(160.4760) Materials : Optical properties
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
ToC Category:
Materials
History
Original Manuscript: May 3, 2005
Revised Manuscript: August 16, 2005
Manuscript Accepted: September 2, 2005
Citation
Kristine Rosfjord, Chang Chang, Ryan Miyakawa, Holly Barth, and David Attwood, "Direct index of refraction measurements at extreme-ultraviolet and soft-x-ray wavelengths," Appl. Opt. 45, 1730-1736 (2006)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-45-8-1730
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