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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 46, Iss. 16 — Jun. 1, 2007
  • pp: 3169–3176

Laser linear encoder with both high fabrication and head-to-scale tolerances

Chyan-Chyi Wu, Wen-Jong Wu, Zheng-Seng Pan, and Chih-Kung Lee  »View Author Affiliations

Applied Optics, Vol. 46, Issue 16, pp. 3169-3176 (2007)

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We introduce a new configuration for the optical head of a newly developed diffractive laser encoder system. This configuration has a high manufacturing tolerance and a high head-to-scale alignment tolerance, both of which can enhance the wider potential applicability of this newly designed laser encoder. The measurement principles of the encoder are discussed and detailed. We optimized the grating shape and analyzed the impact of the optical components and their arrangement on the measurement error. The head-to-scale alignment tolerance and the arrangement of components in the encoder were also determined. Finally, the measurement performance was evaluated and analyzed. Under nonenvironmentally controlled conditions, the measurement accuracy was found to be 37.3 nm with a standard deviation of 25.4   nm .

© 2007 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(230.0230) Optical devices : Optical devices
(230.2090) Optical devices : Electro-optical devices

ToC Category:
Optical Devices

Original Manuscript: January 26, 2006
Revised Manuscript: December 12, 2006
Manuscript Accepted: March 7, 2007
Published: May 15, 2007

Chyan-Chyi Wu, Wen-Jong Wu, Zheng-Seng Pan, and Chih-Kung Lee, "Laser linear encoder with both high fabrication and head-to-scale tolerances," Appl. Opt. 46, 3169-3176 (2007)

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