Compact ellipsometer employing a static polarimeter module with arrayed polarizer and wave-plate elements
Applied Optics, Vol. 46, Issue 22, pp. 4963-4967 (2007)
http://dx.doi.org/10.1364/AO.46.004963
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Abstract
A portable ellipsometer with a compact static polarimeter using an arrayed polarizer,
an arrayed wave plate, and a CCD image sensor is developed. A high level of repeatability at a measurement speed of 0.3 s is demonstrated by measurement of
© 2007 Optical Society of America
OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.5410) Instrumentation, measurement, and metrology : Polarimetry
ToC Category:
Ellipsometry and Polarimetry
History
Original Manuscript: October 23, 2006
Revised Manuscript: April 16, 2007
Manuscript Accepted: April 22, 2007
Published: July 6, 2007
Citation
Takashi Sato, Takeshi Araki, Yoshihiro Sasaki, Toshihide Tsuru, Toshiyasu Tadokoro, and Shojiro Kawakami, "Compact ellipsometer employing a static polarimeter module with arrayed polarizer and wave-plate elements," Appl. Opt. 46, 4963-4967 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-22-4963
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