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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 22 — Aug. 1, 2007
  • pp: 5282–5292

Phase shifting Fizeau interferometry of front and back surfaces of optical flats

Joachim Heil, Tobias Bauer, Stefan Schmax, Thomas Sure, and Joachim Wesner  »View Author Affiliations


Applied Optics, Vol. 46, Issue 22, pp. 5282-5292 (2007)
http://dx.doi.org/10.1364/AO.46.005282


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Abstract

The interpretation of Fizeau interferograms of optical flats is not straightforward because they are composed of more than two reflections. This results in a confusing fringe pattern. There are three main contributions to the interferogram given by the reflections from the reference surface, the front and the rear surface of the sample. We present a new to the best of our knowledge solution to the problem. We use phase shifting measurements of the wave fields, which are reflected by and transmitted through the sample. This eliminates the need for the suppression of reflections by immersion or other methods. As an illustration of this method, several examples will also be presented.

© 2007 Optical Society of America

OCIS Codes
(070.2590) Fourier optics and signal processing : ABCD transforms
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4120) Instrumentation, measurement, and metrology : Moire' techniques
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

ToC Category:
Interferometry

History
Original Manuscript: March 7, 2007
Manuscript Accepted: April 14, 2007
Published: July 9, 2007

Citation
Joachim Heil, Tobias Bauer, Stefan Schmax, Thomas Sure, and Joachim Wesner, "Phase shifting Fizeau interferometry of front and back surfaces of optical flats," Appl. Opt. 46, 5282-5292 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-22-5282


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