We demonstrate the use of spots taken with magnetorheological finishing (MRF) for estimating subsurface damage (SSD) depth from deterministic microgrinding for three hard ceramics: aluminum oxynitride ( {\text{Al}}_{\text{23}}{\text{O}}_{\text{27}}{\text{N 5}}_{} ∕ALON), polycrystalline alumina ( {\text{Al}}_{\text{2}}{\text{O 3}}_{} ∕PCA), and chemical vapor deposited (CVD) silicon carbide \left({\text{Si}}_{\text{4}}\text{C}/\text{SiC}\right) . Using various microscopy techniques to characterize the surfaces, we find that the evolution of surface microroughness with the amount of material removed shows two stages. In the first, the damaged layer and SSD induced by microgrinding are removed, and the surface microroughness reaches a low value. Peak-to-valley (p-v) surface microroughness induced from grinding gives a measure of the SSD depth in the first stage. With the removal of additional material, a second stage develops, wherein the interaction of MRF and the material's microstructure is revealed. We study the development of this texture for these hard ceramics with the use of power spectral density to characterize surface features.