Determination of retardation parameters of multiple-order wave plate using a phase-sensitive heterodyne ellipsometer
Applied Optics, Vol. 46, Issue 23, pp. 5944-5950 (2007)
http://dx.doi.org/10.1364/AO.46.005944
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Abstract
To characterize the linear birefringence of a multiple-order wave plate (MWP), an oblique incidence is one of the methods available. Multiple reflections in the MWP are produced, and oscillations in the phase retardation measurement versus the oblique incident angle are then measured. Therefore, an antireflection coated MWP is required to avoid oscillation of the phase retardation measurement. In this study, we set up a phase-sensitive heterodyne ellipsometer to measure the phase retardations of an uncoated MWP versus the oblique incident angle, which was scanned in the x–z plane and y–z plane independently. Thus, the effect on multiple reflections by the MWP is reduced by means of subtracting the two measured phase retardations from each other. As a result, a highly sensitive and accurate measurement of retardation parameters (RPs), which includes the refractive indices of the extraordinary ray
© 2007 Optical Society of America
OCIS Codes
(040.2840) Detectors : Heterodyne
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5410) Instrumentation, measurement, and metrology : Polarimetry
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: March 21, 2007
Revised Manuscript: June 5, 2007
Manuscript Accepted: June 5, 2007
Published: August 9, 2007
Citation
Cheng-Hung Hsieh, Chien-Chung Tsai, Hsiang-Chun Wei, Li-Ping Yu, Jheng-Syong Wu, and Chien Chou, "Determination of retardation parameters of multiple-order wave plate using a phase-sensitive heterodyne ellipsometer," Appl. Opt. 46, 5944-5950 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-23-5944
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