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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 46, Iss. 23 — Aug. 10, 2007
  • pp: 5964–5966

Fabrication of x-ray zone plates by surface-plasma chemical vapor deposition

K. M. Golant, S. V. Lavrishchev, A. V. Popov, I. A. Artyukov, R. M. Feshchenko, A. N. Mitrofanov, and A. V. Vinogradov  »View Author Affiliations

Applied Optics, Vol. 46, Issue 23, pp. 5964-5966 (2007)

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A new cost-efficient sputter-slice technology for hard x-ray ( 10 30   keV ) Fresnel zone plates fabrication, imposing no limitation to aspect ratio, is proposed. By means of a plasma chemical process, SiO 2 / Si 1 x G e x O 2 glassy film multilayer structures are deposited on a lateral surface of a silica rod, outermost layers being as thin as 100   nm . It has been shown by numerical simulation that for x = 0.2 germanium fraction, 100 300 μ m zone plate thickness and the number of zones of about 1000, first order diffraction efficiency as high as 20%–30% at the energy of approximately 20 keV can be achieved.

© 2007 Optical Society of America

OCIS Codes
(340.7440) X-ray optics : X-ray imaging
(340.7450) X-ray optics : X-ray interferometry
(340.7460) X-ray optics : X-ray microscopy

ToC Category:
X-ray Optics

Original Manuscript: March 30, 2007
Manuscript Accepted: June 13, 2007
Published: August 9, 2007

K. M. Golant, S. V. Lavrishchev, A. V. Popov, I. A. Artyukov, R. M. Feshchenko, A. N. Mitrofanov, and A. V. Vinogradov, "Fabrication of x-ray zone plates by surface-plasma chemical vapor deposition," Appl. Opt. 46, 5964-5966 (2007)

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  1. G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, and Y. Liu, "Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light," Opt. Lett. 31, 1214-1216 (2006). [CrossRef] [PubMed]
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  6. A. Duvel, D. Rudolph, and G. Schmahl, "Fabrication of thick zone plates for multikilovolt X-rays," in Proceedings of 6th International Conference on X-ray Microscopy, W. Meyer-Ilse, T. Warwick, and D. Attwood, eds. (American Institute of Physics CP507, 2000), pp. 607-614.
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