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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 46, Iss. 27 — Sep. 20, 2007
  • pp: 6719–6726

Cancellation of the zeroth order in a phase mask by mode interplay in a high index contrast binary grating

E. Gamet, A. V. Tishchenko, and O. Parriaux  »View Author Affiliations

Applied Optics, Vol. 46, Issue 27, pp. 6719-6726 (2007)

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A new grating phase mask is designed that allows the cancellation of the zeroth transmitted order in a diffraction configuration where the grating period is smaller than twice the exposure wavelength. An analytical treatment based on the true-mode method delivers the structure parameters, achieving 100% interference contrast. This modal approach is used to describe the modal operation of the giant reflection to zero-order device.

© 2007 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1960) Diffraction and gratings : Diffraction theory
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.3740) Optical design and fabrication : Lithography

ToC Category:
Optical Design and Fabrication

Original Manuscript: March 8, 2007
Revised Manuscript: July 27, 2007
Manuscript Accepted: July 27, 2007
Published: September 12, 2007

E. Gamet, A. V. Tishchenko, and O. Parriaux, "Cancellation of the zeroth order in a phase mask by mode interplay in a high index contrast binary grating," Appl. Opt. 46, 6719-6726 (2007)

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  1. S.-W. Ahn, K.-D. Lee, J.-S. Kim, S.-H. Kim, J.-D. Park, S.-H. Lee, and P.-W. Yoon, "Fabrication of a 50 nm half-pitch wire grid polarizer using nanoimprint lithography," Nanotechnology 16, 1874-1877 (2005). [CrossRef]
  2. A. V. Tishchenko, "Phenomenological representation of deep and high contrast lamellar gratings by means of the modal method," Opt. Quantum Electron. 37, 309-330 (2005). [CrossRef]
  3. J. Y. Suratteau, M. Cadilhac, and R. Petit, "On the numerical study of deep dielectric lamellar gratings," J. Opt. 14, 273-288 (1983). [CrossRef]
  4. A. V. Tishchenko and N. Lyndin, "The true modal method solves intractable problems: TM incidence on fine metal slits (but the C method also!)," Workshop on Grating Theory, Clermont-Ferrand, France, June 2004.
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