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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 27 — Sep. 20, 2007
  • pp: 6719–6726

Cancellation of the zeroth order in a phase mask by mode interplay in a high index contrast binary grating

E. Gamet, A. V. Tishchenko, and O. Parriaux  »View Author Affiliations


Applied Optics, Vol. 46, Issue 27, pp. 6719-6726 (2007)
http://dx.doi.org/10.1364/AO.46.006719


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Abstract

A new grating phase mask is designed that allows the cancellation of the zeroth transmitted order in a diffraction configuration where the grating period is smaller than twice the exposure wavelength. An analytical treatment based on the true-mode method delivers the structure parameters, achieving 100% interference contrast. This modal approach is used to describe the modal operation of the giant reflection to zero-order device.

© 2007 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1960) Diffraction and gratings : Diffraction theory
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.3740) Optical design and fabrication : Lithography

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: March 8, 2007
Revised Manuscript: July 27, 2007
Manuscript Accepted: July 27, 2007
Published: September 12, 2007

Citation
E. Gamet, A. V. Tishchenko, and O. Parriaux, "Cancellation of the zeroth order in a phase mask by mode interplay in a high index contrast binary grating," Appl. Opt. 46, 6719-6726 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-27-6719


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References

  1. S.-W. Ahn, K.-D. Lee, J.-S. Kim, S.-H. Kim, J.-D. Park, S.-H. Lee, and P.-W. Yoon, "Fabrication of a 50 nm half-pitch wire grid polarizer using nanoimprint lithography," Nanotechnology 16, 1874-1877 (2005). [CrossRef]
  2. A. V. Tishchenko, "Phenomenological representation of deep and high contrast lamellar gratings by means of the modal method," Opt. Quantum Electron. 37, 309-330 (2005). [CrossRef]
  3. J. Y. Suratteau, M. Cadilhac, and R. Petit, "On the numerical study of deep dielectric lamellar gratings," J. Opt. 14, 273-288 (1983). [CrossRef]
  4. A. V. Tishchenko and N. Lyndin, "The true modal method solves intractable problems: TM incidence on fine metal slits (but the C method also!)," Workshop on Grating Theory, Clermont-Ferrand, France, June 2004.
  5. D. Delbeke, R. Baets, and P. Muys, "Polarization-selective beam splitter based on a highly efficient simple binary diffraction grating," Appl. Opt. 43, 6157-6165 (2004). [CrossRef] [PubMed]
  6. T. Clausnitzer, T. Kämpfe, E.-B. Kley, A. Tünnermann, U. Peschel, A. V. Tishchenko, and O. Parriaux, "An intelligible explanation of highly efficient diffraction in deep dielectric rectangular transmission gratings," Opt. Express 13, 10448-10456 (2005). [CrossRef] [PubMed]

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