Computational experiments on optical coating production using monochromatic monitoring strategy aimed at eliminating a cumulative effect of thickness errors
Applied Optics, Vol. 46, Issue 28, pp. 6936-6944 (2007)
http://dx.doi.org/10.1364/AO.46.006936
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Abstract
We present an algorithm for the automatic generation of a monitoring spreadsheet that enables the most effective application of the termination level correction algorithm proposed in our previous publication. On a whole the presented monochromatic monitoring strategy entirely eliminates a cumulative effect of thickness errors in optical coating production using direct optical monitoring. The effectiveness of the new monitoring strategy is demonstrated by computational manufacturing experiments in which such error factors as instability of deposition rates, errors in measured transmittance data, shutter delays, and variations of layer refractive indices from their theoretical values are simulated.
© 2007 Optical Society of America
OCIS Codes
(240.0310) Optics at surfaces : Thin films
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication
ToC Category:
Thin Films
History
Original Manuscript: January 16, 2007
Manuscript Accepted: July 24, 2007
Published: September 24, 2007
Citation
Alexander V. Tikhonravov, Michael K. Trubetskov, and Tatiana V. Amotchkina, "Computational experiments on optical coating production using monochromatic monitoring strategy aimed at eliminating a cumulative effect of thickness errors," Appl. Opt. 46, 6936-6944 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-28-6936
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