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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 46, Iss. 29 — Oct. 10, 2007
  • pp: 7141–7148

Dual-wavelength vertical scanning low-coherence interferometric microscope

Jan Niehues, Peter Lehmann, and Klaus Bobey  »View Author Affiliations


Applied Optics, Vol. 46, Issue 29, pp. 7141-7148 (2007)
http://dx.doi.org/10.1364/AO.46.007141


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Abstract

White-light interferometry has turned into a standard tool in the field of high-accuracy topography measurements. Nevertheless, surfaces with relatively large local surface tilts or height steps often give rise to systematic measuring errors. The reasons are diffraction and dispersion effects, which cause deviations between height values obtained from the envelope maximum of the white-light interference signal and those obtained from the signal's phase. In certain cases this may result in ghost steps appearing in the measured topography. To identify and eliminate these ghost steps we use a second LED emitting light at a different mean wavelength. This now allows the measurement of curved or structured specular surfaces with high resolution, which up to now was restricted by the mentioned effects.

© 2007 Optical Society of America

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(150.6910) Machine vision : Three-dimensional sensing
(180.3170) Microscopy : Interference microscopy
(180.6900) Microscopy : Three-dimensional microscopy

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: March 9, 2007
Revised Manuscript: June 18, 2007
Manuscript Accepted: August 16, 2007
Published: October 4, 2007

Virtual Issues
Vol. 2, Iss. 11 Virtual Journal for Biomedical Optics

Citation
Jan Niehues, Peter Lehmann, and Klaus Bobey, "Dual-wavelength vertical scanning low-coherence interferometric microscope," Appl. Opt. 46, 7141-7148 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-29-7141

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