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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 46, Iss. 29 — Oct. 10, 2007
  • pp: 7202–7206

Controlling large-scale film morphology by phase manipulation in interference lithography

Cheng Lu, X. K. Hu, S. S. Dimov, and R. H. Lipson  »View Author Affiliations

Applied Optics, Vol. 46, Issue 29, pp. 7202-7206 (2007)

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An experimental arrangement is described where a Babinet–Soleil compensator is inserted into the path of one of the three beams used for noncoplanar beam interference lithography. This birefringent element can change the phase of the beam so that either a positive two-dimensional pattern or an inverselike structure is generated in a photoresist without disturbing the mechanical geometry of the setup. Simulations are presented that confirm the validity of this approach. Large defect-free sample areas ( > 1 cm 2 ) with submicrometer periodic patterns were obtained by expanding the laser beams used in the lithography experiment.

© 2007 Optical Society of America

OCIS Codes
(000.2170) General : Equipment and techniques
(050.5080) Diffraction and gratings : Phase shift
(260.3160) Physical optics : Interference

ToC Category:
Physical Optics

Original Manuscript: July 6, 2007
Manuscript Accepted: August 24, 2007
Published: October 4, 2007

Cheng Lu, X. K. Hu, S. S. Dimov, and R. H. Lipson, "Controlling large-scale film morphology by phase manipulation in interference lithography," Appl. Opt. 46, 7202-7206 (2007)

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