We report the simultaneous multipoint fabrication of polymer rods by the femtosecond laser processing of a negative photoresist using a microlens array (MLA). The rods were periodically arranged in the form of an array corresponding to the MLA and free-standing on a glass substrate. The use of a photomask enabled us to define the contour of the rod array. Furthermore, sample translation techniques were demonstrated for the effective fabrication of large-area structures.
© 2007 Optical Society of America
Original Manuscript: August 2, 2007
Revised Manuscript: October 12, 2007
Manuscript Accepted: October 15, 2007
Published: November 26, 2007
Shigeki Matsuo, Takashi Miyamoto, Takuro Tomita, and Shuichi Hashimoto, "Applications of a microlens array and a photomask to the laser microfabrication of a periodic photopolymer rod array," Appl. Opt. 46, 8264-8267 (2007)