Improved Fourier-transform profilometry
Applied Optics, Vol. 46, Issue 5, pp. 664-668 (2007)
http://dx.doi.org/10.1364/AO.46.000664
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Abstract
An improved optical geometry of the projected-fringe profilometry technique, in which the exit pupil of the projecting lens and the entrance pupil of the imaging lens are neither at the same height above the reference plane nor coplanar, is discussed and used in Fourier-transform profilometry. Furthermore, an improved fringe-pattern description and phase-height mapping formula based on the improved geometrical generalization is deduced. Employing the new optical geometry, it is easier for us to obtain the full-field fringe by moving either the projector or the imaging device. Therefore the new method offers a flexible way to obtain reliable height distribution of a measured object.
© 2007 Optical Society of America
OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.2830) Instrumentation, measurement, and metrology : Height measurements
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: May 30, 2006
Manuscript Accepted: September 26, 2006
Published: January 25, 2007
Citation
Xianfu Mao, Wenjing Chen, and Xianyu Su, "Improved Fourier-transform profilometry," Appl. Opt. 46, 664-668 (2007)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-46-5-664
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