Antireflection coatings for 193 nm composed of low-index ( {\mathrm{MgF}}_2 and {\mathrm{AlF}}_3 ) and high-index ( {\mathrm{LaF}}_3 and {\mathrm{GdF}}_3 ) materials are deposited by the resistive heating boat method at a substrate temperature of 300 °C. The optical characteristics (reflectance and optical loss), microstructure (morphology and surface roughness), stress, and laser-induced damage threshold (LIDT) of the coatings are investigated and discussed. The related reflection at 193 nm of the four kinds of antireflection coatings is smaller than 0.2% and the optical loss is less than 0.15%. Of the fluoride antireflection coatings, {\mathrm{AlF}}_3 ∕ {\mathrm{GdF}}_3 had the lowest stress value. Antireflection coatings with {\mathrm{AlF}}_3 as the low-index material had higher LIDT values than when {\mathrm{MgF}}_2 was used.