White-light interferometry on rough surfaces--measurement uncertainty caused by surface roughness
Applied Optics, Vol. 47, Issue 16, pp. 2941-2949 (2008)
http://dx.doi.org/10.1364/AO.47.002941
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Abstract
White-light interferometry measuring an optically rough surface commonly does not resolve the lateral structure of the surface. This means that there are height differences within one resolution cell that exceed one-fourth of the wavelength of the light used. Thus the following questions arise: Which height is measured by white-light interferometry? How does the surface roughness affect the measurement uncertainty? The goal of the presented paper is to answer these questions by means of numerical simulations. Before the aforementioned questions can be answered, the distribution of the intensity of individual speckles, the influence of surface roughness, and the spectral width of the light source used are discussed.
© 2008 Optical Society of America
OCIS Codes
(030.6140) Coherence and statistical optics : Speckle
(030.6600) Coherence and statistical optics : Statistical optics
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
ToC Category:
Coherence and Statistical Optics
History
Original Manuscript: February 28, 2008
Revised Manuscript: April 16, 2008
Manuscript Accepted: April 18, 2008
Published: May 21, 2008
Citation
Pavel Pavliček and Ondřej Hýbl, "White-light interferometry on rough surfaces--measurement uncertainty caused by surface roughness," Appl. Opt. 47, 2941-2949 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-16-2941
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