OSA's Digital Library

Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 47, Iss. 25 — Sep. 1, 2008
  • pp: 4540–4547

Large-core single-mode rib SU8 waveguide using solvent-assisted microcontact molding

Cheng-Sheng Huang and Wei-Chih Wang  »View Author Affiliations

Applied Optics, Vol. 47, Issue 25, pp. 4540-4547 (2008)

View Full Text Article

Enhanced HTML    Acrobat PDF (14185 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



This paper describes a novel fabrication technique for constructing a polymer-based large-core single-mode rib waveguide. A negative tone SU8 photoresist with a high optical transmission over a large wave length range and stable mechanical properties was used as a waveguide material. A waveguide was constructed by using a polydimethylsiloxane stamp combined with a solvent-assisted microcontact molding technique. The effects on the final pattern’s geometry of four different process conditions were investigated. Optical simulations were performed using beam propagation method software. Single-mode beam propagation was observed at the output of the simulated waveguide as well as the actual waveguide through the microscope image.

© 2008 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(160.5470) Materials : Polymers
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.1480) Optical devices : Bragg reflectors
(130.7408) Integrated optics : Wavelength filtering devices
(130.5460) Integrated optics : Polymer waveguides

ToC Category:
Optical Design and Fabrication

Original Manuscript: November 30, 2007
Revised Manuscript: May 22, 2008
Manuscript Accepted: July 24, 2008
Published: August 26, 2008

Cheng-Sheng Huang and Wei-Chih Wang, "Large-core single-mode rib SU8 waveguide using solvent-assisted microcontact molding," Appl. Opt. 47, 4540-4547 (2008)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. C.-G. Choi, “Fabrication of optical waveguides in thermosetting polymers using hot embossing,” J. Micromech. Microeng. 14, 945-949 (2004). [CrossRef]
  2. C.-G. Choi, S. P. Han, B. C. Kim, S.-H. Ahn, and M.-Y. Jeong, “Fabrication of large-core 1-16 optical power splitters in polymers using hot-embossing process,” IEEE Photonics Technol. Lett. 15, 825-827 (2003). [CrossRef]
  3. H. Ma, A. K.-Y. Jen, and L. R. Dalton, “Polymer-based optical waveguides: materials, processing and devices,” Adv. Mater. 14, 1339-1365 (2002). [CrossRef]
  4. S. P. Pogossian, L. Vescan, and A. Vonsovici, “Single-mode condition for semiconductor rib waveguides with large cross section,” J. Lightwave Technol. 16, 1851-1853 (1998). [CrossRef]
  5. A. Neyer, T. Knoche, and L. Muller, “Fabrication of low-loss polymer waveguides using injection-molding technology,” Electron. Lett. 29, 399-401 (1993). [CrossRef]
  6. P. R. Ashley and T. A. Tumolillo, Jr., “Channel waveguides in electro-optic polymers using a photopolymer cladding technique,” Appl. Phys. Lett. 58, 884-886 (1991). [CrossRef]
  7. M.-C. Oh, H. J. Lee, M. H. Lee, J.-H. Ahn, S. G. Han, and H.-G. Kim, “Tunable wavelength filters with Bragg gratings in polymer waveguides,” Appl. Phys. Lett. 73, 2543-2545 (1998). [CrossRef]
  8. L. Eldada, C. Xu, K. M. T. Stengel, L. W. Shacklette, and J. T. Yardley, “Laser-fabricated low-loss single mode raised rib waveguiding devices in polymers,” J. Lightwave Technol. 14, 1704-1712 (1996). [CrossRef]
  9. R. Feng and R. J. Farris, “Influence of processing conditions on the thermal and mechanical properties of SU8 negative photoresist coatings,” J. Micromech. Microeng. 13, 80-88 (2003). [CrossRef]
  10. A. S. Holland, A. Mitchell, V. S. Balkunje, M. W. Austin, and M. K. Raghunathan, “Fabrication of raised and inverted SU8 polymer waveguides,” Proc. SPIE 5644, 353-365 (2005). [CrossRef]
  11. A. S. Holland, V. S. Balkunje, A. Mitchell, M. W. Austin, M. K. Raghunathan, K. Mukund, and G. Kostovski, “Effects of design geometry on SU8 polymer waveguides,” Proc. SPIE 5649, 186-194 (2005). [CrossRef]
  12. H.-L. Chen, C. I. Hsieh, C.-C. Cheng, C.-P. Chang, W.-H. Hsu, W.-S. Wang, and P.-T. Liul, “Porous materials with ultralow optical constants for integrated optical device applications,” Jpn. J. Appl. Phys. 44, 5673-5676 (2005). [CrossRef]
  13. J. M. Ruano-Lopez, M. Aguirregabiria, M. Tijero, M. T. Arroyo, J. Elizalde, J. Berganzo, I. Aranburu, F. J. Blanco, and K. Mayora, “A new SU8 process to integrate buried waveguides and sealed microchannels for Lab-on-a-Chip,” Sens. Actuators B Chem. 114, 542-551 (2006). [CrossRef]
  14. D. Esinenco, S. D. Psoma, M. Kusko, A. Schneider, and R. Muller, “SU-8 micro-biosensor based on Mach-Zehnder interferometer,” Rev. Adv. Mater. Sci. 10, 295-299 (2005).
  15. J.-S. Kim, J.-W. Kang, and J.-J. Kim, “Simple and low cost fabrication of thermally stable polymeric multimode waveguides using a UV-curable epoxy,” Jpn. J. Appl. Phys. 42, 1277-1279 (2003). [CrossRef]
  16. T. C. Sum, A. A. Bettiol, J. A. Van Kan, F. Watt, E. Y. B. Pun, and K. K. Tung, “Proton beam writing of low-loss polymer optical waveguides,” Appl. Phys. Lett. 83, 1707-1709 (2003). [CrossRef]
  17. W. H. Wong, J. Zhou, and E. Y. B. Pun, “Low-loss polymeric optical waveguides using electron-beam direct writing,” Appl. Phys. Lett. 78, 2110-2012 (2001). [CrossRef]
  18. R. Panergo, C.-S. Huang, C.-S. Liu, P. G. Reinhall, and W.-C. Wang, “Resonant polymeric waveguide cantilever integrated for optical scanning,” J. Lightwave Technol. 25, 850-860(2007). [CrossRef]
  19. R. A. Soref, J. Schmidtchen, and K. Petermann, “Large single-mode rib waveguide in GeSi-Si and Si-on-SiO2,” IEEE J. Quantum Electron. 27, 1971-1974 (1991). [CrossRef]
  20. O. Powell, “Single mode condition for silicon rib waveguide,” J. Lightwave Technol. 20, 1851-1855 (2002). [CrossRef]
  21. A. G. Rickman and G. T. Reed, “Silicon-on-insulator optical rib waveguide loss and mode characteristics,” J. Lightwave Technol. 12, 1771-1776 (1994). [CrossRef]
  22. E. Kim, X. M. Zhao, and G. Whitesides, “Solvent-assisted microcontact molding: a convenient method for fabricating three imensional structures on surface of polymers,” Adv. Mater. 9, 651-654 (1997). [CrossRef]
  23. Y. Xia and G. Whitesides, “Soft lithography,” Annu. Rev. Mater. Sci. 28, 153-184 (1998). [CrossRef]
  24. Z.-G. Ling, K. Lian, and L. Jian, “Improved patterning quality of SU-8 microstructures by optimizing the exposure parameters,” Proc. SPIE 3999, 1019-1027 (2000). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited