OSA's Digital Library

Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 47, Iss. 28 — Oct. 1, 2008
  • pp: 5117–5122

Determination of optical parameters of very thin ( λ / 50 ) films

Petya Gushterova, Peter Sharlandjiev, and Boian Hristov  »View Author Affiliations

Applied Optics, Vol. 47, Issue 28, pp. 5117-5122 (2008)

View Full Text Article

Enhanced HTML    Acrobat PDF (1837 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A straightforward approach for estimation of thickness (d), real ( ε 1 ) and imaginary parts ( ε 2 ) of the complex permittivity of very thin films from spectrophotometric measurements is presented. The uncertainties in ε 1 , ε 2 , and d due to methodical error and the uncertainties in the measured quantities are investigated. It is shown that the influence of these factors is considerable when ε 1 , ε 2 , and d are obtained simultaneously for each wavelength. The accuracy of ε 1 , ε 2 , and d is significantly increased if the value of d is evaluated first, its value is kept constant over the whole spectral region, and then ε 1 and ε 2 are calculated for each wave length.

© 2008 Optical Society of America

OCIS Codes
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(120.5240) Instrumentation, measurement, and metrology : Photometry
(120.5700) Instrumentation, measurement, and metrology : Reflection
(120.7000) Instrumentation, measurement, and metrology : Transmission

ToC Category:
Thin Films

Original Manuscript: April 16, 2008
Revised Manuscript: July 16, 2008
Manuscript Accepted: August 7, 2008
Published: September 24, 2008

Petya Gushterova, Peter Sharlandjiev, and Boian Hristov, "Determination of optical parameters of very thin (λ/50) films," Appl. Opt. 47, 5117-5122 (2008)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. I. Chambouleyron, J. M. Martínez, A. C. Morettin, and M. Mulato, “Retrieval of optical constants and thickness of thin films from transmission spectra,” Appl. Opt. 36, 8238-8247 (1997). [CrossRef]
  2. D. Pekker and L. Pekker, “A method for determining thickness and optical constants of absorbing thin films,” Thin Solid Films 425, 203-209 (2003). [CrossRef]
  3. X. Sun, R. Hong, H. Hou, Z. Fan, and J. Shao, “Optical properties of silver thin films deposited by magnetron sputtering with different thicknesses,” Chin. Opt. Lett. 4, 366-369(2006).
  4. W. McGahan, B. Johs, and J. Woollam, “Techniques for ellipsometric measurements of thickness and optical constants of thin absorbing films,” Thin Solid Films 234, 443-446 (1993). [CrossRef]
  5. E. G. Birgin, I. E. Chambouleyron, J. M. Martínez, and S. D. Ventura, “Estimation of optical parameters of very thin films,” Appl. Numer. Math. 47, 109-119 (2003). [CrossRef]
  6. E. Bondar, Yu. Kulyupin, and N. Popovich, “The inverse problem of the phenomenological theory of the optical properties of thin films,” Thin Solid Films 55, 201-209 (1978). [CrossRef]
  7. H. Wolter, “Zur optik dünner metallfilme,” Z. Phys. 105, 269-308 (1937). [CrossRef]
  8. F. Abeles, “Facteurs de reflexion et de transmission des coudhes metalliques tres minces: Methode nouvell pour determiner leurs indeces et leurs epaisseurs,” Rev. Opt., Theor. Instrum. 32, 257-268 (1953).
  9. M. Born and E. Wolf, Principles of Optics (Pergamon, 1983).
  10. B. Hristov, P. Gushterova, and P. Sharlandjiev, “Analytical solution of the inverse optical problem for very thin films,” J. Optoelectron. Adv. Mater. 9, 217-220 (2007).
  11. P. Gushterova, P. Sharlandjiev, and K. Petkov, “Optical response of very thin As-Se films,” Proc. SPIE 6252, 6252OT(2006).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited