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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: James C. Wyant
  • Vol. 47, Iss. 28 — Oct. 1, 2008
  • pp: 5117–5122

Determination of optical parameters of very thin ( λ / 50 ) films

Petya Gushterova, Peter Sharlandjiev, and Boian Hristov  »View Author Affiliations


Applied Optics, Vol. 47, Issue 28, pp. 5117-5122 (2008)
http://dx.doi.org/10.1364/AO.47.005117


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Abstract

A straightforward approach for estimation of thickness (d), real ( ε 1 ) and imaginary parts ( ε 2 ) of the complex permittivity of very thin films from spectrophotometric measurements is presented. The uncertainties in ε 1 , ε 2 , and d due to methodical error and the uncertainties in the measured quantities are investigated. It is shown that the influence of these factors is considerable when ε 1 , ε 2 , and d are obtained simultaneously for each wavelength. The accuracy of ε 1 , ε 2 , and d is significantly increased if the value of d is evaluated first, its value is kept constant over the whole spectral region, and then ε 1 and ε 2 are calculated for each wave length.

© 2008 Optical Society of America

OCIS Codes
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(120.5240) Instrumentation, measurement, and metrology : Photometry
(120.5700) Instrumentation, measurement, and metrology : Reflection
(120.7000) Instrumentation, measurement, and metrology : Transmission

ToC Category:
Thin Films

History
Original Manuscript: April 16, 2008
Revised Manuscript: July 16, 2008
Manuscript Accepted: August 7, 2008
Published: September 24, 2008

Citation
Petya Gushterova, Peter Sharlandjiev, and Boian Hristov, "Determination of optical parameters of very thin (λ/50) films," Appl. Opt. 47, 5117-5122 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-28-5117

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