Improving optical bench radius measurements using stage error motion data
Applied Optics, Vol. 47, Issue 36, pp. 6692-6700 (2008)
http://dx.doi.org/10.1364/AO.47.006692
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Abstract
We describe the application of a vector-based radius approach to optical bench radius measurements in the presence of imperfect stage motions. In this approach, the radius is defined using a vector equation and homogeneous transformation matrix formulism. This is in contrast to the typical technique, where the displacement between the confocal and cat’s eye null positions alone is used to determine the test optic radius. An important aspect of the vector-based radius definition is the intrinsic correction for measurement biases, such as straightness errors in the stage motion and cosine misalignment between the stage and displacement gauge axis, which lead to an artificially small radius value if the traditional approach is employed. Measurement techniques and results are provided for the stage error motions, which are then combined with the setup geometry through the analysis to determine the radius of curvature for a spherical artifact. Comparisons are shown between the new vector-based radius calculation, traditional radius computation, and a low uncertainty mechanical measurement. Additionally, the measurement uncertainty for the vector-based approach is determined using Monte Carlo simulation and compared to experimental results.
© 2008 Optical Society of America
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(220.4840) Optical design and fabrication : Testing
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: September 4, 2008
Manuscript Accepted: September 23, 2008
Published: December 11, 2008
Citation
Tony L. Schmitz, Neil Gardner, Matthew Vaughn, Kate Medicus, and Angela Davies, "Improving optical bench radius measurements using stage error motion data," Appl. Opt. 47, 6692-6700 (2008)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-47-36-6692
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