Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Optical properties and microstructure of Ta 2 O 5 biaxial film

Not Accessible

Your library or personal account may give you access

Abstract

This study investigates the optical properties and microstructure of Ta2O5 film deposited with the glancing angle deposition technique. The tilted nanocolumn microstructure, examined with scanning electron microscopy, induces the optical anisotropy of thin film. The optical properties of thin film are characterized with an inverse synthesis method. Based on the Cauchy model, the dispersion equations of optical constants of film are determined from the transmittance spectra measured at normal and oblique incidence over 400800nm. The starting values derived with an envelope method quicken the optimization process greatly. The dispersion of the principal indices N1, N2, and N3 and the thickness d of thin film are presented statistically. A good agreement between the measured optical properties and theoretical calculation is obtained, which validates the model established for thin film produced by glancing angle deposition.

© 2008 Optical Society of America

Full Article  |  PDF Article
More Like This
Extended x-ray absorption fine structure measurements on asymmetric bipolar pulse direct current magnetron sputtered Ta2O5 thin films

S. Maidul Haque, Pankaj R. Sagdeo, D. D. Shinde, J. S. Misal, S. N. Jha, D. Bhattacharyya, and N. K. Sahoo
Appl. Opt. 54(22) 6744-6751 (2015)

Third-order nonlinear optical properties of sol–gel-derived V2O5, Nb2O5, and Ta2O5 thin films

Tadanori Hashimoto and Toshinobu Yoko
Appl. Opt. 34(16) 2941-2948 (1995)

Optical Propagation in Sheet and Pattern Generated Films of Ta2O5

D. H. Hensler, J. D. Cuthbert, R. J. Martin, and P. K. Tien
Appl. Opt. 10(5) 1037-1042 (1971)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (3)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved