Monitoring error compensation in general optical coatings
Applied Optics, Vol. 48, Issue 22, pp. 4475-4482 (2009)
http://dx.doi.org/10.1364/AO.48.004475
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Abstract
Error compensation in optical monitoring was demonstrated many years ago for narrow bandpass and edge filters. It is shown here that the compensation effects can apply to a broader range of more general coatings. This is illustrated with a very broadband antireflection coating design of 20 layers and a ramp design of 13 layers. The choice of monitoring wavelength and monitoring strategy are important, and suggestions are made concerning those choices. The results are derived from and demonstrated by computer simulations of the monitoring processes. The importance of monitoring directly on only one part and with one wavelength throughout the process in order to obtain the benefits of error compensation is emphasized.
© 2009 Optical Society of America
OCIS Codes
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication
(310.4165) Thin films : Multilayer design
(310.6805) Thin films : Theory and design
ToC Category:
Thin Films
History
Original Manuscript: May 27, 2009
Manuscript Accepted: July 12, 2009
Published: July 28, 2009
Citation
Ronald R. Willey, "Monitoring error compensation in general optical coatings," Appl. Opt. 48, 4475-4482 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-22-4475
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