OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 24 — Aug. 20, 2009
  • pp: 4801–4813

Conditions for primitive-lattice-vector-direction equal contrasts in four-beam-interference lithography

Justin L. Stay and Thomas K. Gaylord  »View Author Affiliations


Applied Optics, Vol. 48, Issue 24, pp. 4801-4813 (2009)
http://dx.doi.org/10.1364/AO.48.004801


View Full Text Article

Enhanced HTML    Acrobat PDF (833 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Four distinct conditions for primitive-lattice-vector-direction equal contrasts in four-beam interference are introduced and described. By maximizing the absolute contrast subject to an equal contrast condition, lithographically useful interference patterns are found. Each condition is described in terms of the corresponding constraints on the plane wave wave vectors, polarizations, and intensities. The resulting locations of global intensity maxima, minima, and saddle points are presented. Subordinate conditions for unity absolute contrast are also developed. Three lattices are treated for each condition: simple cubic, face-centered cubic, and body-centered cubic.

© 2009 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(110.3960) Imaging systems : Microlithography
(220.3740) Optical design and fabrication : Lithography
(110.4235) Imaging systems : Nanolithography
(350.4238) Other areas of optics : Nanophotonics and photonic crystals
(050.5298) Diffraction and gratings : Photonic crystals

ToC Category:
Diffraction and Gratings

History
Original Manuscript: April 9, 2009
Manuscript Accepted: July 28, 2009
Published: August 19, 2009

Citation
Justin L. Stay and Thomas K. Gaylord, "Conditions for primitive-lattice-vector-direction equal contrasts in four-beam-interference lithography," Appl. Opt. 48, 4801-4813 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-24-4801

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article

OSA is a member of CrossRef.

CrossCheck Deposited