OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 29 — Oct. 10, 2009
  • pp: 5561–5566

Disturbance-free phase-shifting laser diode interferometer using adaptive feedback control

Takamasa Suzuki, Tsutomu Takahashi, and Osami Sasaki  »View Author Affiliations


Applied Optics, Vol. 48, Issue 29, pp. 5561-5566 (2009)
http://dx.doi.org/10.1364/AO.48.005561


View Full Text Article

Enhanced HTML    Acrobat PDF (1137 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A feedback-control-equipped phase-shifting laser diode interferometer that eliminates external disturbance is proposed. The feedback loop is stabilized by adaptive control of the polarity of the interference signal. Conventional phase-shifting interferometry can be used with the feedback control, resulting in simplified signal processing and accurate measurement. Several experiments confirm the stability of the feedback control with a measurement repeatability of 1.8 ‚ÄČ nm .

© 2009 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(140.2020) Lasers and laser optics : Diode lasers

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: June 29, 2009
Revised Manuscript: August 29, 2009
Manuscript Accepted: September 20, 2009
Published: October 5, 2009

Citation
Takamasa Suzuki, Tsutomu Takahashi, and Osami Sasaki, "Disturbance-free phase-shifting laser diode interferometer using adaptive feedback control," Appl. Opt. 48, 5561-5566 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-29-5561

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited