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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 29 — Oct. 10, 2009
  • pp: 5561–5566

Disturbance-free phase-shifting laser diode interferometer using adaptive feedback control

Takamasa Suzuki, Tsutomu Takahashi, and Osami Sasaki  »View Author Affiliations

Applied Optics, Vol. 48, Issue 29, pp. 5561-5566 (2009)

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A feedback-control-equipped phase-shifting laser diode interferometer that eliminates external disturbance is proposed. The feedback loop is stabilized by adaptive control of the polarity of the interference signal. Conventional phase-shifting interferometry can be used with the feedback control, resulting in simplified signal processing and accurate measurement. Several experiments confirm the stability of the feedback control with a measurement repeatability of 1.8 nm .

© 2009 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(140.2020) Lasers and laser optics : Diode lasers

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: June 29, 2009
Revised Manuscript: August 29, 2009
Manuscript Accepted: September 20, 2009
Published: October 5, 2009

Takamasa Suzuki, Tsutomu Takahashi, and Osami Sasaki, "Disturbance-free phase-shifting laser diode interferometer using adaptive feedback control," Appl. Opt. 48, 5561-5566 (2009)

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