Two dimensional refractive index profiles of ion exchanged channel waveguides in glass have been measured using an interferometric method. In order to obtain depth data, a shallow bevel is produced in the glass by polishing. A regularization algorithm for the extraction of the phase data from the interferometer image is presented. The method is applied to waveguides formed by the electric field assisted diffusion of ${\mathrm{Cu}}^{+}$ ions into a borosilicate glass. The index change obtained from the interferometer is in good agreement with that obtained from measurements on planar waveguides.

© 2009 Optical Society of America

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