Abstract
We describe a microreflectance difference () spectrometer based on a charge coupled device (CCD), in contrast to most common RD spectrometers that are based on a photomultiplier or a photodiode as a light detector. The advantage of our instrument over others is the possibility to isolate the RD spectrum of specific areas of the sample; thus topographic maps of the surface can be obtained. In our setup we have a maximum spatial resolution of approximately and a spectral range from 1.2 to . To illustrate the performance of the spectrometer, we have measured strains in mechanically polished GaAs single crystals.
© 2009 Optical Society of America
Full Article | PDF ArticleMore Like This
Wei Huang, Yu Liu, Laipan Zhu, Xiantong Zheng, Yuan Li, Qing Wu, Yixin Wang, Xinqiang Wang, and Yonghai Chen
Opt. Express 24(13) 15059-15070 (2016)
Jinling Yu, Yonghai Chen, Shuying Cheng, and Yunfeng Lai
Appl. Opt. 52(5) 1035-1040 (2013)
Valeriy A. Sterligov, Yuri V. Subbota, Yuri M. Shirshov, Lidia P. Pochekaylova, Eugene F. Venger, Raisa V. Konakova, and Igor Yu. Ilyin
Appl. Opt. 38(12) 2666-2676 (1999)