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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 33 — Nov. 20, 2009
  • pp: 6479–6484

Subdivision and direction recognition of λ / 16 of orthogonal fringes for nanometric measurement

Haijiang Hu, Xiaoqian Qiu, Jing Wang, Aisong Ju, and Yunbo Zhang  »View Author Affiliations


Applied Optics, Vol. 48, Issue 33, pp. 6479-6484 (2009)
http://dx.doi.org/10.1364/AO.48.006479


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Abstract

Subdivision is one of the essential methods to improve the measurement resolution of optical instruments. A new method is proposed to solve λ / 16 bidirectional subdivision and direction recognition for orthogonal interference signals by constructing two sets of reference signals and using zero-cross detection. The experimental results prove that the method is efficient for orthogonal signals and has good real-time performance by field-programmable gate array realization. This method is easy to realize by use of electronic design automation tools and can be widely used in the signal processing system of optical measurement instruments such as a moiré fringe measurement system and laser interferometer.

© 2009 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4120) Instrumentation, measurement, and metrology : Moire' techniques

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: August 20, 2009
Revised Manuscript: October 29, 2009
Manuscript Accepted: October 30, 2009
Published: November 16, 2009

Citation
Haijiang Hu, Xiaoqian Qiu, Jing Wang, Aisong Ju, and Yunbo Zhang, "Subdivision and direction recognition of λ/16 of orthogonal fringes for nanometric measurement," Appl. Opt. 48, 6479-6484 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-33-6479

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