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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 4 — Feb. 1, 2009
  • pp: 758–764

Paired circularly polarized heterodyne ellipsometer

Chih-Jen Yu, Chu-En Lin, Li-Ping Yu, and Chien Chou  »View Author Affiliations

Applied Optics, Vol. 48, Issue 4, pp. 758-764 (2009)

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We develop a paired circularly polarized heterodyne ellipsometer (PCPHE), in which a heterodyne interferometer based on a two-frequency circularly polarized laser beam is set up. It belongs to an amplitude-sensitive ellipsometer that is able to provide not only a wider dynamic range of polarization modulation frequency but also a higher detection sensitivity than that of a conventional photometric ellipsometer. A real-time and precise measurement of ellipsometric parameters, which demonstrated an accuracy of less than 1 nm on thickness measurement of Si O 2 thin film deposited on silicon substrate, can be applied with the PCPHE.

© 2009 Optical Society of America

OCIS Codes
(040.2840) Detectors : Heterodyne
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3180) Instrumentation, measurement, and metrology : Interferometry

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: October 7, 2008
Revised Manuscript: January 3, 2009
Manuscript Accepted: January 5, 2009
Published: January 23, 2009

Chih-Jen Yu, Chu-En Lin, Li-Ping Yu, and Chien Chou, "Paired circularly polarized heterodyne ellipsometer," Appl. Opt. 48, 758-764 (2009)

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  1. R. Greef, “An automatic ellipsometer for use in electrochemical investigations,” Rev. Sci. Instrum. 41, 532-538 (1970). [CrossRef]
  2. C. V. Kent, “A photoelectric method for the determination of the parameters of elliptically polarized light,” J. Opt. Soc. Am. 27, 117-119 (1937). [CrossRef]
  3. D. E. Aspnes, “Optimizing precision of rotating-analyzer and rotating-compensator ellipsometers,” J. Opt. Soc. Am. A 21, 403-410 (2004). [CrossRef]
  4. S. N. Jasperson, D. K. Burge, and R. C. O'Handley, “A modulated ellipsometer for studying thin film optical properties and surface dynamics,” Surf. Sci. 37, 548-558 (1973). [CrossRef]
  5. S. N. Jasperson and S. E. Schnatterly, “An improved method for high reflectivity ellipsometry based on a new polarization modulation technique,” Rev. Sci. Instrum. 40, 761-767 (1969). [CrossRef]
  6. M. W. Wang, Y. F. Chao, K. C. Leou, F. H. Tsai, T. L. Lin, S. S. Chen, and Y. W. Liu, “Calibrations of phase modulation amplitude of photoelastic modulator,” Jpn. J. Appl. Phys. 43, 827-832 (2004). [CrossRef]
  7. K. Postava, A. Maziewski, T. Yamaguchi, R. Ossikovski, S. Višňovsky, and J. Pištora, “Null ellipsometer with phase modulation,” Opt. Express 12, 6040-6045 (2004). [CrossRef] [PubMed]
  8. J. Shamir and Y. Fainman, “Rotating linearly polarized light source,” Appl. Opt. 21, 364-365 (1982). [CrossRef] [PubMed]
  9. J. Shamir and A. Klein, “Ellipsometry with rotating plane-polarized light,” Appl. Opt. 25, 1476-1480 (1986). [CrossRef] [PubMed]
  10. L. Singher, A. Brunfeld, and J. Shamir, “Ellipsometry with a stabilized Zeeman laser,” Appl. Opt. 29, 2405-2408 (1990). [CrossRef] [PubMed]
  11. W. Mao, S. Zhang, L. Cui, and Y. Tan, “Self-mixing interference effects with a folding feedback cavity in Zeeman-birefringence dual frequency laser,” Opt. Express 14, 182-189 (2006). [CrossRef] [PubMed]
  12. D. C. Su, M. H. Chiu, and C. D. Chen, “Simple two-frequency laser,” Precision Eng. 18, 161-163 (1996). [CrossRef]
  13. Y. L. Chen and D. C. Su, “Method for determining full-field absolute phases in the common-path heterodyne interferometer with an electro-optic modulator,” Appl. Opt. 47, 6518-6523 (2008). [CrossRef] [PubMed]
  14. Step wafer ID 0153 from Mikropack GmbH, Germany. The calibration data sheet of step wafer SiO2 on Si serial number ID0153, by Dipl-Ing (FH) Michael Kaiser, Labor für Mikrosystemtechnik FH-München, Germany.
  15. P. R. Berington and D. K. Robinson, Data Reduction and Error Analysis for the Physical Sciences (McGraw-Hill, 1992).
  16. C. Chou, H. K. Teng, C. J. Yu, and H. S. Huang, “Polarization modulation imaging ellipsometry for thin film thickness measurement,” Opt. Commun. 273, 74-83 (2007). [CrossRef]
  17. S. Bertucci, A. Pawlowski, N. Nicolas, L. Johann, A. El Ghemmaz, N. Stein, and R. Kleim “Systematic errors in fixed polarizer, rotating polarizer, sample, fixed analyzer spectroscopic ellipsometry,” Thin Solid Films 313-314, 73-78 (1998). [CrossRef]
  18. L. C. Peng, C. Chou, C. W. Lyu, and J. C. Hsieh, “Zeeman laser-scanning confocal microscopy in turbid media,” Opt. Lett. 26, 349-351 (2001). [CrossRef]
  19. Y. L. Lo, H. W. Chih, C. Y. Yeh, and T. C. Yu, “Full-field heterodyne polariscope with an image signal processing method for principal axis and phase retardation measurements,” Appl. Opt. 45, 8006-8012 (2006). [CrossRef] [PubMed]

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