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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 4 — Feb. 1, 2009
  • pp: 758–764

Paired circularly polarized heterodyne ellipsometer

Chih-Jen Yu, Chu-En Lin, Li-Ping Yu, and Chien Chou  »View Author Affiliations


Applied Optics, Vol. 48, Issue 4, pp. 758-764 (2009)
http://dx.doi.org/10.1364/AO.48.000758


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Abstract

We develop a paired circularly polarized heterodyne ellipsometer (PCPHE), in which a heterodyne interferometer based on a two-frequency circularly polarized laser beam is set up. It belongs to an amplitude-sensitive ellipsometer that is able to provide not only a wider dynamic range of polarization modulation frequency but also a higher detection sensitivity than that of a conventional photometric ellipsometer. A real-time and precise measurement of ellipsometric parameters, which demonstrated an accuracy of less than 1 ‚ÄČ nm on thickness measurement of Si O 2 thin film deposited on silicon substrate, can be applied with the PCPHE.

© 2009 Optical Society of America

OCIS Codes
(040.2840) Detectors : Heterodyne
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3180) Instrumentation, measurement, and metrology : Interferometry

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: October 7, 2008
Revised Manuscript: January 3, 2009
Manuscript Accepted: January 5, 2009
Published: January 23, 2009

Citation
Chih-Jen Yu, Chu-En Lin, Li-Ping Yu, and Chien Chou, "Paired circularly polarized heterodyne ellipsometer," Appl. Opt. 48, 758-764 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-4-758

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