OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 48, Iss. 5 — Feb. 10, 2009
  • pp: 958–963

Low-loss silicon-on-insulator shallow-ridge TE and TM waveguides formed using thermal oxidation

R. Pafchek, R. Tummidi, J. Li, M. A. Webster, E. Chen, and T. L. Koch  »View Author Affiliations


Applied Optics, Vol. 48, Issue 5, pp. 958-963 (2009)
http://dx.doi.org/10.1364/AO.48.000958


View Full Text Article

Enhanced HTML    Acrobat PDF (493 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A thermal oxidation fabrication technique is employed to form low-loss high-index-contrast silicon shallow-ridge waveguides in silicon-on-insulator (SOI) with maximally tight vertical confinement. Drop-port responses from weakly coupled ring resonators demonstrate propagation losses below 0.36 dB / cm for TE modes. This technique is also combined with “magic width” designs mitigating severe lateral radiation leakage for TM modes to achieve propagation loss values of 0.94 dB / cm . We discuss the fabrication process utilized to form these low-loss waveguides and implications for sensor devices in particular.

© 2009 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.2790) Integrated optics : Guided waves
(130.3120) Integrated optics : Integrated optics devices
(130.3130) Integrated optics : Integrated optics materials
(130.5990) Integrated optics : Semiconductors

ToC Category:
Integrated Optics

History
Original Manuscript: July 10, 2008
Revised Manuscript: January 7, 2009
Manuscript Accepted: January 9, 2009
Published: February 4, 2009

Citation
R. Pafchek, R. Tummidi, J. Li, M. A. Webster, E. Chen, and T. L. Koch, "Low-loss silicon-on-insulator shallow-ridge TE and TM waveguides formed using thermal oxidation," Appl. Opt. 48, 958-963 (2009)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-48-5-958

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited