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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 10 — Apr. 1, 2010
  • pp: 1774–1779

Further investigation of the characteristics of nodular defects

Xiaofeng Liu, Dawei Li, Yuan’an Zhao, and Xiao Li  »View Author Affiliations

Applied Optics, Vol. 49, Issue 10, pp. 1774-1779 (2010)

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To increase the understanding of the damage sensitivity of nodular defects and provide exact evidence for theoretical study, the structures and the damage behavior of nodular defects in electron-beam deposited mirrors of HfO 2 / SiO 2 are systemically investigated with a double-beam microscope (focused ion beam, scanning electron microscope). Nodular defects are classified into two kinds. In one kind the boundaries between nodules and the surrounding layers have become continuous for the last deposited materials, and in the other there are discontinuous boundaries between nodules and the surrounding layers. Nodular defects of the first kind typically have low domes, and the second have high domes. Laser damage experiments show that nodular defects of the first kind usually have a high laser resistance, and the laser-induced damage thresholds are limited in the second class of nodules. The dominant pa rameter of nodular defects related to damage is the height of the nodular defect.

© 2010 Optical Society of America

OCIS Codes
(140.3330) Lasers and laser optics : Laser damage
(240.0310) Optics at surfaces : Thin films
(310.1620) Thin films : Interference coatings

ToC Category:
Lasers and Laser Optics

Original Manuscript: December 14, 2009
Revised Manuscript: March 1, 2010
Manuscript Accepted: March 2, 2010
Published: March 25, 2010

Xiaofeng Liu, Dawei Li, Yuan'an Zhao, and Xiao Li, "Further investigation of the characteristics of nodular defects," Appl. Opt. 49, 1774-1779 (2010)

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