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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 23 — Aug. 10, 2010
  • pp: 4450–4459

Investigation on the properties of a laminar grating as a soft x-ray beam splitter

Ying Liu, Hans-Jörg Fuchs, Zhengkun Liu, Huoyao Chen, Shengnan He, Shaojun Fu, Ernst-Bernhard Kley, and Andreas Tünnermann  »View Author Affiliations


Applied Optics, Vol. 49, Issue 23, pp. 4450-4459 (2010)
http://dx.doi.org/10.1364/AO.49.004450


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Abstract

Laminar-type gratings as soft x-ray beam splitters for interferometry are presented. Gold-coated grating beam splitters with 1000 lines / mm are designed for grazing incidence operation at 13.9 nm . They are routinely fabricated using electron beam lithography and ion etching techniques. The laminar grating is measured to have almost equal absolute efficiencies of about 20% in the zeroth and 1 st orders, which enables a fringe visibility up to 0.99 in the interferometer. The discrepancy of the grating profiles between the optimized theoretical and the experimental results is analyzed according to the comparison of the optimized simulation results and the measurement realization of the grating efficiencies. By a precise control of the grating profile, the grating efficiency in the 1 st order and the fringe visibility could be improved to 25% and 1, respectively.

© 2010 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.1360) Optical devices : Beam splitters
(340.7450) X-ray optics : X-ray interferometry
(260.6048) Physical optics : Soft x-rays

ToC Category:
Diffraction and Gratings

History
Original Manuscript: March 16, 2010
Revised Manuscript: July 11, 2010
Manuscript Accepted: July 12, 2010
Published: August 6, 2010

Citation
Ying Liu, Hans-Jörg Fuchs, Zhengkun Liu, Huoyao Chen, Shengnan He, Shaojun Fu, Ernst-Bernhard Kley, and Andreas Tünnermann, "Investigation on the properties of a laminar grating as a soft x-ray beam splitter," Appl. Opt. 49, 4450-4459 (2010)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-49-23-4450

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