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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 34 — Dec. 1, 2010
  • pp: 6624–6629

Spectrally resolved phase-shifting interference microscopy: technique based on optical coherence tomography for profiling a transparent film on a patterned substrate

Sanjit K. Debnath, Seung-Woo Kim, Mahendra P. Kothiyal, and Parameswaran Hariharan  »View Author Affiliations


Applied Optics, Vol. 49, Issue 34, pp. 6624-6629 (2010)
http://dx.doi.org/10.1364/AO.49.006624


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Abstract

Spectrally resolved white-light phase-shifting interference microscopy has been used for measurements of the thickness profile of a transparent thin-film layer deposited upon a patterned structure exhibiting steps and discontinuities. We describe a simple technique, using an approach based on spectrally resolved optical coherence tomography, that makes it possible to obtain directly a thickness profile along a line by inverse Fourier transformation of the complex spectral interference function.

© 2010 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: June 10, 2010
Revised Manuscript: October 15, 2010
Manuscript Accepted: October 21, 2010
Published: November 30, 2010

Citation
Sanjit K. Debnath, Seung-Woo Kim, Mahendra P. Kothiyal, and Parameswaran Hariharan, "Spectrally resolved phase-shifting interference microscopy: technique based on optical coherence tomography for profiling a transparent film on a patterned substrate," Appl. Opt. 49, 6624-6629 (2010)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-49-34-6624

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