Abstract
We introduce a microscope system using a solid immersion lens (SIL) to image Blu-ray disc samples without removing the protective cover layer. The aberration caused by the cover layer is minimized with a truncated SIL. A subsurface imaging simulation is achieved by using the rigorous coupled wave theory, partial coherence, vector diffraction, and the Babinet principle. Simulated results are compared with experimental images and atomic force microscopy measurements.
© 2010 Optical Society of America
Full Article | PDF ArticleMore Like This
Tatsuro Ide, Shigeharu Kimura, Eriko Tatsu, Takahiro Kurokawa, Koichi Watanabe, Yumiko Anzai, and Toshimichi Shintani
Appl. Opt. 49(12) 2309-2315 (2010)
Seung-Hune Yang, Tom Milster, Jong Rak Park, and Jun Zhang
J. Opt. Soc. Am. A 27(5) 1012-1023 (2010)
Jun Zhang, Yongsik Kim, Seung-Hune Yang, and Tom D. Milster
J. Opt. Soc. Am. A 27(10) 2272-2284 (2010)