OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 49, Iss. 9 — Mar. 20, 2010
  • pp: 1599–1606

Effect of fabrication errors on the diffraction pattern produced by sawtooth gratings

Francisco Jose Torcal-Milla, Irina Harder, and Norbert Lindlein  »View Author Affiliations


Applied Optics, Vol. 49, Issue 9, pp. 1599-1606 (2010)
http://dx.doi.org/10.1364/AO.49.001599


View Full Text Article

Enhanced HTML    Acrobat PDF (1006 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

In this work we investigate, analytically and numerically, the effect on the diffracted field produced by typical fabrication errors in sawtooth gratings. The analysis is carried out for the near and far field, showing the effects on the intensity and on the diffraction orders efficiency. When the grating profile is not perfect but presents a curved profile or overdevelopment error, some different diffraction orders appear, changing the intensity and the efficiency of each order. In addition, when roughness is present, a decreasing of efficiency is produced, but without generating different diffraction orders than the first one. We show the analytical dependence of these modifications in terms of the profile of the grating, cor roborating the results with numerical methods.

© 2010 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1950) Diffraction and gratings : Diffraction gratings
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Diffraction and Gratings

History
Original Manuscript: December 16, 2009
Manuscript Accepted: February 18, 2010
Published: March 11, 2010

Citation
Francisco Jose Torcal-Milla, Irina Harder, and Norbert Lindlein, "Effect of fabrication errors on the diffraction pattern produced by sawtooth gratings," Appl. Opt. 49, 1599-1606 (2010)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-49-9-1599


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. E. G. Loewen and E. Popov, Diffraction Gratings and Applications (Dekker, 1997).
  2. C. Palmer, Diffraction Grating Handbook (Richardson Grating Laboratory, 2000).
  3. J. Dübendorfer and R. E. Kunz, “Compact integrated optical immunosensor using replicated chirped grating coupler sensor chips,” Appl. Opt. 37, 1890-1894 (1998). [CrossRef]
  4. M. Wiki and R. E. Kunz, “Wavelength-interrogated optical sensor for biochemical applications,” Opt. Lett. 25, 463-465(2000). [CrossRef]
  5. S. Ura, T. Suhara, H. Nishihara, and J. Koyama, “An integrated-optic disk pickup device,” J. Lightwave Technol. 4, 913-918 (1986). [CrossRef]
  6. T. Suhara and H. Nishihara, “Integrated optics components and devices using periodic structures,” IEEE J. Quantum Electron. 22, 845-867 (1986). [CrossRef]
  7. S. Hava and M. Auslender, “Silicon grating-based mirror for 1.3 μm polarized beams: MATLAB-aided design,” Appl. Opt. 34, 1053-1058 (1995). [CrossRef] [PubMed]
  8. D. L. Brundrett, T. K. Gaylord, and E. N. Glytsis, “Polarizing mirror/absorber for visible wavelengths based on a silicon subwavelength grating: design and fabrication,” Appl. Opt. 37, 2534-2541 (1998). [CrossRef]
  9. N. Rajkumar and J. N. McMullin, “V-groove gratings on silicon for infrared beam splitting,” Appl. Opt. 34, 2556-2559 (1995). [CrossRef] [PubMed]
  10. D. L. Brundrett, E. N. Glytsis, and T. K. Gaylord, “Normal-incidence guided-mode resonant grating filters: design and experimental demonstration,” Opt. Lett. 23, 700-702 (1998). [CrossRef]
  11. Z. Hegedus and R. Netterfield, “Low sideband guided-mode resonant filter,” Appl. Opt. 39, 1469-1473 (2000). [CrossRef]
  12. S. Tibuleac and R. Magnusson, “Narrow-linewidth bandpass filters with diffractive thin-film layers,” Opt. Lett. 26, 584-586(2001). [CrossRef]
  13. Y. Li, D. Chen, and C. Yang, “Sub-microns period grating couplers fabricated by silicon mold,” Opt. Laser Technol. 33, 623-626 (2001). [CrossRef]
  14. G. R. Harrison, S. W. Thompson, H. Kazukonis, and J. R. Connell, “750 mm ruling engine producing large gratings and echelles,” J. Opt. Soc. Am. 62, 751-756 (1972). [CrossRef]
  15. M. Okano, H. Kikuta, Y. Hirai, K. Yamamoto, and T. Yotsuya, “Optimization of diffraction grating profiles in fabrication by electron-beam lithography,” Appl. Opt. 43, 5137-5142 (2004). [CrossRef] [PubMed]
  16. F. J. Torcal-Milla, L. M. Sanchez-Brea, and E. Bernabeu, “Talbot effect with rough reflection gratings,” Appl. Opt. 46, 3668-3673 (2007). [CrossRef] [PubMed]
  17. L. M. Sanchez-Brea, F. J. Torcal-Milla, and E. Bernabeu, “Talbot effect in metallic gratings under Gaussian illumination,” Opt. Commun. 278, 23-27 (2007). [CrossRef]
  18. J. M. Rico-Garcia and L. M. Sanchez-Brea, “Binary gratings with random heights,” Appl. Opt. 48, 3062-3069 (2009). [CrossRef] [PubMed]
  19. F. J. Torcal-Milla, L. M. Sanchez-Brea, and E. Bernabeu, “Diffraction of gratings with rough edges,” Opt. Express 16, 19757-19769 (2008). [CrossRef] [PubMed]
  20. T. Fujita, H. Nishihara, and J. Koyama, “Blazed gratings and Fresnel lenses fabricated by electron-beam lithography,” Opt. Lett. 7, 578-580 (1982). [CrossRef] [PubMed]
  21. F. Shen and A. Wang, “Fast-Fourier-transform based numerical integration method for the Rayleigh-Sommerfeld diffraction formula,” Appl. Opt. 451102-1110 (2006). [CrossRef] [PubMed]
  22. W. H. F. Talbot, “Facts relating to optical science,” Philos. Mag. 9, 401-407 (1836).
  23. K. Patorski, “The self-imaging phenomenon and its applications,” Prog. Opt. 27, 1-108 (1989). [CrossRef]
  24. L. M. Sanchez-Brea, F. J. Torcal-Milla, and E. Bernabeu, “Far field of gratings with rough strips,” J. Opt. Soc. Am. A 25, 828-833 (2008). [CrossRef]
  25. F. J. Torcal-Milla, L. M. Sanchez-Brea, and E. Bernabeu, “Self-imaging of gratings with rough strips,” J. Opt. Soc. Am. A 25, 2390-2394 (2008). [CrossRef]
  26. P. Beckmann and A. Spizzichino, The Scattering of Electromagnetic Waves from Rough Surfaces (Artech, 1987).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited