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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 11 — Apr. 10, 2011
  • pp: 1541–1547

High-speed measurement of three-dimensional surface profiles up to 10 μm using two-wavelength phase-shifting interferometry utilizing an injection locking technique

Roma Jang, Chu-Shik Kang, Jong-Ahn Kim, Jae Wan Kim, Jae-Eun Kim, and Hae Yong Park  »View Author Affiliations


Applied Optics, Vol. 50, Issue 11, pp. 1541-1547 (2011)
http://dx.doi.org/10.1364/AO.50.001541


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Abstract

High-speed two-wavelength phase-shifting interferometry is presented. The technique is aimed at high-speed in-line inspection of spacers in liquid crystal display panels or wafer bumps where the measuring range is well determined and high-speed measurements are essential. With our test setup, the measuring range is extended to 10 μm by using two injection locked frequency scanning lasers that offer fast and equidistant phase shifting of interference fringes. A technique to determine the unwrapped phase map in a frequency scanning phase-shifting interferometry without the ordinary phase-unwrapping process is proposed.

© 2011 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(140.3520) Lasers and laser optics : Lasers, injection-locked
(200.4560) Optics in computing : Optical data processing

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: October 13, 2010
Revised Manuscript: January 13, 2011
Manuscript Accepted: January 18, 2011
Published: April 4, 2011

Citation
Roma Jang, Chu-Shik Kang, Jong-Ahn Kim, Jae Wan Kim, Jae-Eun Kim, and Hae Yong Park, "High-speed measurement of three-dimensional surface profiles up to 10 μm using two-wavelength phase-shifting interferometry utilizing an injection locking technique," Appl. Opt. 50, 1541-1547 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-11-1541

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