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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 18 — Jun. 20, 2011
  • pp: 3015–3020

Characterization of zone plate properties using monochromatic synchrotron radiation in the 2 to 20 nm wavelength range

John Seely, Benjawan Kjornrattanawanich, Leonid Goray, Yan Feng, and James Bremer  »View Author Affiliations

Applied Optics, Vol. 50, Issue 18, pp. 3015-3020 (2011)

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A zone plate composed of Mo zones having 4 mm outermost zone diameter, 100 nm outermost zone width, and supported on a silicon nitride membrane was characterized using monochromatic synchrotron radiation in the 2 to 20 nm wavelength range. The zero and first order efficiencies were measured and compared to ab initio calculations that account for the optical properties of the materials, the width and shape of the zones, and multiple-layer thin-film effects. It is shown that the thicknesses of the Mo zones and the membrane and the ratio of the zone width to zone period can be independently determined from the measured diffraction efficiencies in the zero and first orders and that the computational code can be used to reliably design zone plates that are optimized for applications such as solar irradiance monitors in the extreme ultraviolet region.

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(050.1960) Diffraction and gratings : Diffraction theory
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
Diffraction and Gratings

Original Manuscript: April 18, 2011
Revised Manuscript: May 18, 2011
Manuscript Accepted: May 23, 2011
Published: June 15, 2011

John Seely, Benjawan Kjornrattanawanich, Leonid Goray, Yan Feng, and James Bremer, "Characterization of zone plate properties using monochromatic synchrotron radiation in the 2 to 20 nm wavelength range," Appl. Opt. 50, 3015-3020 (2011)

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