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Low-loss optical channel drop filters based on high-contrast Si–air photonic crystals by wet anisotropic etching

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Abstract

Fiber pigtailed optical channel drop filters based on high-contrast silicon (Si)–air photonic crystals (PCs) have been designed and fabricated. A low fiber-to-fiber insertion loss of 2.2dB is achieved using lensed fiber pigtails inserted into alignment grooves fabricated along with the filter layers that have smooth vertical sidewalls obtained by the high-aspect-ratio crystallographic orientation-dependent wet anisotropic etching of (110) planar Si wafer. Four filters with varying defect widths have been fabricated to drop wavelengths in the 15201603nm range. It is shown that a 2% to 8% change in the periodicity and the associated change in the filling factor introduced in the constituent PC mirrors leads to large photonic bandgaps.

© 2011 Optical Society of America

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