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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 31 — Nov. 1, 2011
  • pp: 5983–5989

Laser direct writing of rotationally symmetric high-resolution structures

Matthias Haefner, Christof Pruss, and Wolfgang Osten  »View Author Affiliations


Applied Optics, Vol. 50, Issue 31, pp. 5983-5989 (2011)
http://dx.doi.org/10.1364/AO.50.005983


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Abstract

We present a laser direct writing system for the efficient fabrication of high-resolution axicon structures. The setup makes use of scanning beam interference lithography incorporated with a fringe locking scheme for tight fringe phase control and allows us to fabricate large area structures with a period down to 450 nm .

© 2011 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(090.1970) Holography : Diffractive optics
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Diffraction and Gratings

History
Original Manuscript: March 31, 2011
Revised Manuscript: July 5, 2011
Manuscript Accepted: July 12, 2011
Published: October 27, 2011

Citation
Matthias Haefner, Christof Pruss, and Wolfgang Osten, "Laser direct writing of rotationally symmetric high-resolution structures," Appl. Opt. 50, 5983-5989 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-31-5983


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References

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