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Preparation of wide range refractive index diamond-like carbon films by means of plasma-enhanced chemical vapor deposition |
Applied Optics, Vol. 50, Issue 31, pp. G69-G73 (2011)
http://dx.doi.org/10.1364/AO.50.000G69
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Abstract
Plasma-enhanced chemical vapor deposition technology has been elaborated for obtaining diamond-like carbon (DLC) coatings of a wide range of properties. Alternative and direct bias voltages have been applied on the substrate, and refractive index dependencies upon various deposition technological parameters have been investigated. The frequency of the bias voltage has been varied in the region of
© 2011 Optical Society of America
OCIS Codes
(160.4670) Materials : Optical materials
(160.4760) Materials : Optical properties
(310.6860) Thin films : Thin films, optical properties
(160.4236) Materials : Nanomaterials
History
Original Manuscript: July 1, 2011
Revised Manuscript: September 8, 2011
Manuscript Accepted: September 11, 2011
Published: October 13, 2011
Citation
A. Gharibyan, D. Hayrapetyan, Zh. Panosyan, and Ye. Yengibaryan, "Preparation of wide range refractive index diamond-like carbon films by means of plasma-enhanced chemical vapor deposition," Appl. Opt. 50, G69-G73 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-31-G69
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