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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 31 — Nov. 1, 2011
  • pp: G69–G73

Preparation of wide range refractive index diamond-like carbon films by means of plasma-enhanced chemical vapor deposition

A. Gharibyan, D. Hayrapetyan, Zh. Panosyan, and Ye. Yengibaryan  »View Author Affiliations

Applied Optics, Vol. 50, Issue 31, pp. G69-G73 (2011)

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Plasma-enhanced chemical vapor deposition technology has been elaborated for obtaining diamond-like carbon (DLC) coatings of a wide range of properties. Alternative and direct bias voltages have been applied on the substrate, and refractive index dependencies upon various deposition technological parameters have been investigated. The frequency of the bias voltage has been varied in the region of 150 450 kHz . The maximum refractive index range that has been achieved is 1.46–3.2. Thin DLC films have been prepared on crystalline silicon substrates. Because of the wide range of physical, optical, and mechanical properties of the obtained films, they can successfully be applied in different fields of nano-optics.

© 2011 Optical Society of America

OCIS Codes
(160.4670) Materials : Optical materials
(160.4760) Materials : Optical properties
(310.6860) Thin films : Thin films, optical properties
(160.4236) Materials : Nanomaterials

Original Manuscript: July 1, 2011
Revised Manuscript: September 8, 2011
Manuscript Accepted: September 11, 2011
Published: October 13, 2011

A. Gharibyan, D. Hayrapetyan, Zh. Panosyan, and Ye. Yengibaryan, "Preparation of wide range refractive index diamond-like carbon films by means of plasma-enhanced chemical vapor deposition," Appl. Opt. 50, G69-G73 (2011)

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