OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 34 — Dec. 1, 2011
  • pp: 6384–6390

Laser ablation of silicon using a Bessel-like beam generated by a subwavelength annular aperture structure

Yuh-Yan Yu, Chin-Kai Chang, Ming-Wei Lai, Long-Sun Huang, and Chih-Kung Lee  »View Author Affiliations


Applied Optics, Vol. 50, Issue 34, pp. 6384-6390 (2011)
http://dx.doi.org/10.1364/AO.50.006384


View Full Text Article

Enhanced HTML    Acrobat PDF (581 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Using a femtosecond laser incident to an oxide-metal-oxide film engraved with a subwavelength annular aperture (SAA) structure, we generated a Bessel-like beam to ablate silicon. Experimental results show that the silicon can be ablated with a 0.05 J / cm 2 input ablation threshold at 120 fs pulse duration. We obtained a surface hole possessing a diameter less than 1 μm . Optical performance, including depth-of-focus and focal spot of the SAA structure, were simulated using finite-different time-domain calculations. We found that a far-field laser beam propagating through a SAA structure possesses a submicrometer focal spot and high focus intensity. Our method can be easily adopted for surface machining in microfabrication applications.

© 2011 Optical Society of America

OCIS Codes
(050.1940) Diffraction and gratings : Diffraction
(220.4000) Optical design and fabrication : Microstructure fabrication
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Diffraction and Gratings

History
Original Manuscript: July 22, 2011
Revised Manuscript: September 8, 2011
Manuscript Accepted: September 13, 2011
Published: November 25, 2011

Citation
Yuh-Yan Yu, Chin-Kai Chang, Ming-Wei Lai, Long-Sun Huang, and Chih-Kung Lee, "Laser ablation of silicon using a Bessel-like beam generated by a subwavelength annular aperture structure," Appl. Opt. 50, 6384-6390 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-34-6384

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited