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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 34 — Dec. 1, 2011
  • pp: H68–H74

Phase-conjugate holographic lithography based on micromirror array recording

Yongjun Lim, Joonku Hahn, and Byoungho Lee  »View Author Affiliations


Applied Optics, Vol. 50, Issue 34, pp. H68-H74 (2011)
http://dx.doi.org/10.1364/AO.50.000H68


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Abstract

We present phase-conjugate holographic lithography with a hologram recorded by a digital micromirror device (DMD) and a telecentric lens. In our lithography system, a phase-conjugate hologram is applied instead of conventional masks or reticles to form patterns. This method has the advantage of increasing focus range, and it is applicable to the formation of patterns on fairly uneven surfaces. The hologram pattern is dynamically generated by the DMD, and its resolution is mainly determined by the demagnification of the telecentric lens. We experimentally demonstrate that our holographic lithographic system has a large focus range, and it is feasible to make a large-area hologram by stitching each pattern generated by the DMD without a falling off in resolution.

© 2011 Optical Society of America

OCIS Codes
(090.7330) Holography : Volume gratings
(220.3740) Optical design and fabrication : Lithography
(090.1995) Holography : Digital holography

ToC Category:
Optimization, Improvement, Enhancement, and Coding in Digital Holography

History
Original Manuscript: August 1, 2011
Revised Manuscript: September 30, 2011
Manuscript Accepted: October 13, 2011
Published: November 10, 2011

Virtual Issues
Digital Holography and 3D Imaging 2011 (2011) Applied Optics

Citation
Yongjun Lim, Joonku Hahn, and Byoungho Lee, "Phase-conjugate holographic lithography based on micromirror array recording," Appl. Opt. 50, H68-H74 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-34-H68

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