|
Phase-locked loop based on machine surface topography measurement using lensed fibers |
Applied Optics, Vol. 50, Issue 4, pp. 460-467 (2011)
http://dx.doi.org/10.1364/AO.50.000460
Enhanced HTML 
Acrobat PDF (1071 KB)
Abstract
We present the phase-locked loop (PLL)-based metrology concept using lensed fibers for on-machine surface topography measurement. The shape of a single-mode fiber at the endface was designed using an ABCD matrix method, and two designed lensed fibers—the ball type and the tapered type—were fabricated, and the performance was evaluated, respectively. As a result, the interferometric fringe was not found in the case of the ball lensed fiber, but the machined surface could be measured by utilization of autofocusing and intensity methods. On the other hand, a very clear Fizeau interferometric fringe was observed in the case of the tapered lensed fiber. Its performance was compared with the results of the capacitance sensor and a commercially available white-light interferometer. We confirmed that PLL-based surface profile measurement using the tapered and ball lensed fibers can be applied for on-machine surface topography measurement applications.
© 2011 Optical Society of America
OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: August 31, 2010
Revised Manuscript: November 29, 2010
Manuscript Accepted: December 6, 2010
Published: January 26, 2011
Citation
Jin-Ho Kang, ChaBum Lee, Jae-Young Joo, and Sun-Kyu Lee, "Phase-locked loop based on machine surface topography measurement using lensed fibers," Appl. Opt. 50, 460-467 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-4-460
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Laser surface profiler (OL)
- French Transportable Laser Ranging Station: Scientific Objectives, Technical Features, and Performance (AO)
- Total Internal Reflection for Precision Small-Angle Measurement (AO)
- Calibration Method for Measurement of Linear Nanometric Distances by Scattered Total Internal Reflection (AO)
- Profiles of a high-aspect-ratio grating determined by spectroscopic scatterometry and atomic-force microscopy (AO)
Related Conference Papers
- Carrier-Envelope Phase Stabilization Using Single-Pulse Coherent Control in a Semiconductor
- Traceable radius measurements of micro-lenses
- Traceable radius measurements of micro-lenses
- High-Accuracy Form Measurement with Multiple Sensor Systems
- Sub-10 fs Residual Timing Jitter on a 10 GHz Optical Frequency Comb Generator
« Previous Article | Next Article »
OSA is a member of 