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Fabrication of ellipticity-controlled microlens arrays by controlling the parameters of the multiple-exposure two-beam interference technique |
Applied Optics, Vol. 50, Issue 4, pp. 579-585 (2011)
http://dx.doi.org/10.1364/AO.50.000579
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Abstract
We demonstrate a promising method for fabrication of plastic microlens arrays (MLAs) with a controllable ellipticity and structure, by using the combination of multiple-exposure two-beam interference and plastic replication techniques. Multiple exposures of a two-beam interference pattern with a wavelength of
© 2011 Optical Society of America
OCIS Codes
(090.0090) Holography : Holography
(110.5220) Imaging systems : Photolithography
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(260.3160) Physical optics : Interference
ToC Category:
Optical Design and Fabrication
History
Original Manuscript: October 14, 2010
Manuscript Accepted: December 10, 2010
Published: January 31, 2011
Citation
Danh Bich Do, Ngoc Diep Lai, Cheng Yi Wu, Jian Hung Lin, and Chia Chen Hsu, "Fabrication of ellipticity-controlled microlens arrays by controlling the parameters of the multiple-exposure two-beam interference technique," Appl. Opt. 50, 579-585 (2011)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-50-4-579
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