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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 50, Iss. 9 — Mar. 20, 2011
  • pp: C246–C249

Microstructure and optical properties of Al 2 O 3 prepared by oblique deposition using microsphere shell templates

Wen-Hao Cho, Chao-Te Lee, Chih-Chieh Yu, Chi-Chung Kei, Da-Ren Liu, and Cheng-Chung Lee  »View Author Affiliations

Applied Optics, Vol. 50, Issue 9, pp. C246-C249 (2011)

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We fabricated an orderly inclined Al 2 O 3 column array using a hollow microsphere template. The microstructure and optical properties were investigated with scanning electron micrography and a UV/VIS spectrometer, respectively. Microsphere shell templates were formed using atomic layer deposition to prevent the melting of polystyrene microspheres during the following high-temperature deposition process. An inclined Al 2 O 3 column array with a 30 ° tilt angle was grown by oblique deposition on a substrate with a 75.5 ° tilt angle with respect to the substrate normal. Birefringence and photonic crystalline behavior can be observed in the orderly inclined column array. The difference in the refractive indices between the p and s polarizations of the orderly inclined Al 2 O 3 column array was about 0.1. The photonic properties of the crystal were enhanced compared to those of substrates without patterns.

© 2011 Optical Society of America

OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(310.6628) Thin films : Subwavelength structures, nanostructures

Original Manuscript: August 2, 2010
Revised Manuscript: October 15, 2010
Manuscript Accepted: November 19, 2010
Published: January 7, 2011

Wen-Hao Cho, Chao-Te Lee, Chih-Chieh Yu, Chi-Chung Kei, Da-Ren Liu, and Cheng-Chung Lee, "Microstructure and optical properties of Al2O3 prepared by oblique deposition using microsphere shell templates," Appl. Opt. 50, C246-C249 (2011)

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