Wavelength dependencies of refractive indices of thin film materials differ for various deposition conditions, and it is practically impossible to attribute a single refractive index wavelength dependence to any typical thin film material. Besides objective reasons, differences in the optical parameters of thin films may also be connected with nonadequate choices of models and algorithms used for the processing of measurement data. The main goal of this paper is to present reliable wavelength dependencies of refractive indices of the most widely used slightly absorbing oxide thin film materials. These dependencies can be used by other researchers for comparison and verification of their own characterization results.
© 2011 Optical Society of America
Original Manuscript: July 30, 2010
Manuscript Accepted: September 8, 2010
Published: October 25, 2010
Alexander V. Tikhonravov, Michael K. Trubetskov, Tatiana V. Amotchkina, Gary DeBell, Vladimir Pervak, Anna Krasilnikova Sytchkova, Maria Luisa Grilli, and Detlev Ristau, "Optical parameters of oxide films typically used in optical coating production," Appl. Opt. 50, C75-C85 (2011)