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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 10 — Apr. 1, 2012
  • pp: 1566–1571

Measurement of residual stress for ITO/PET substrates by the double beam shadow moiré interferometer

Hsi-Chao Chen, Kuo-Ting Huang, and Yen-Ming Lo  »View Author Affiliations

Applied Optics, Vol. 51, Issue 10, pp. 1566-1571 (2012)

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This study constructed a measurement system that can quickly and accurately analyze the residual stress of flexible electronics. A double beam shadow moiré interferometer was set up to measure and evaluate the residual stress of tin-doped indium oxide films on a polyethylene terephthalate substrate. However, this system required only two symmetrical fringes to evaluate the residual stress of transparent conductive oxide films on flexible substrate. Applying the grating translation techniques to the double beam shadow moiré interferometer greatly improved the measurement resolution and accuracy, and the relative error was reduced to 1.2%.

© 2012 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4120) Instrumentation, measurement, and metrology : Moire' techniques
(310.4925) Thin films : Other properties (stress, chemical, etc.)
(310.7005) Thin films : Transparent conductive coatings

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: November 18, 2011
Revised Manuscript: December 23, 2011
Manuscript Accepted: January 17, 2012
Published: March 29, 2012

Hsi-Chao Chen, Kuo-Ting Huang, and Yen-Ming Lo, "Measurement of residual stress for ITO/PET substrates by the double beam shadow moiré interferometer," Appl. Opt. 51, 1566-1571 (2012)

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