Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Fabrication and properties of ITO films treated by excited atomic oxygen

Not Accessible

Your library or personal account may give you access

Abstract

We consider the crystallization of ITO films induced by excited atomic oxygen. Owing to it, transmittance of these films in visible ranges increased by 20% and surface impedance dropped from 36 down to 4.6Ω/□. The treatment temperature (127 °C) was significantly below that of conventional crystallization (320 °C). Application of elastic light scattering diagnostics shows that rms surface roughness increased from 2.65 nm up to 4.07 nm after film treatment. ITO treatment does not change isotropic azimuthal structure of the surface.

©2012 Optical Society of America

Full Article  |  PDF Article
More Like This
Optical properties of solution-processable semiconducting TiOx thin films for solar cell and other applications

Jiguang Li, Albert M. DeBerardinis, Lin Pu, and Mool C. Gupta
Appl. Opt. 51(8) 1131-1136 (2012)

Effect of oxygen partial pressure in deposition ambient on the properties of RF magnetron sputter deposited Gd2O3 thin films

S. Maidul Haque, Rajnarayan De, S. Tripathi, C. Mukherjee, A. K. Yadav, Dibyendu Bhattacharyya, S. N. Jha, and N. K. Sahoo
Appl. Opt. 56(22) 6114-6125 (2017)

Comparison of nanosecond and picosecond excitation for two-photon laser-induced fluorescence imaging of atomic oxygen in flames

Jonathan H. Frank, Xiangling Chen, Brian D. Patterson, and Thomas B. Settersten
Appl. Opt. 43(12) 2588-2597 (2004)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (10)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (4)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved