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Applied Optics

Applied Optics


  • Editor: Joseph N. Mait
  • Vol. 51, Iss. 20 — Jul. 10, 2012
  • pp: 4754–4767

Autonomous calibration method of the reference flat surface of an interferometer without using a standard flat surface

Ikumatsu Fujimoto, Toshiyuki Takatsuji, Kunitoshi Nishimura, and Min Young Kim  »View Author Affiliations

Applied Optics, Vol. 51, Issue 20, pp. 4754-4767 (2012)

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An autonomous method for calibrating the reference flat surface of an interferometer is proposed with the uncertainty analysis. The method consists of three phases; the first step is multiple rotating shifts of a specimen, the second is a linear shift, and the last is multiple rotating shifts again. The profile of the reference flat surface is basically determined by the linear shift. The linear shift errors that occurred during the linear shift are identified by the rotating shifts. The rotating shift errors caused by the rotating shifts can be compensated and the residual uncertainty can be reduced in proportion to the square root of the number of rotating shifts per one revolution. Finally, the uncertainty analysis is carried out in detail.

© 2012 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(150.1135) Machine vision : Algorithms
(150.1488) Machine vision : Calibration

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: January 31, 2012
Revised Manuscript: April 10, 2012
Manuscript Accepted: May 2, 2012
Published: July 9, 2012

Ikumatsu Fujimoto, Toshiyuki Takatsuji, Kunitoshi Nishimura, and Min Young Kim, "Autonomous calibration method of the reference flat surface of an interferometer without using a standard flat surface," Appl. Opt. 51, 4754-4767 (2012)

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